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1993_10.1007_BF01371494-references.ris
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1993_10.1007_BF01371494-references.ris
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TY - STD
TI - Alavi, M.; Büttgenbach, S.; Schumacher, A.; Wagner, H.-J.: (1991) New microstructures in silicon using laser machining and anisotropic etching. Proc. Micro System Technologies'91, Berlin, Oct. 29-Nov. 1, pp. 322–324
ID - ref1
ER -
TY - JOUR
AU - Alavi, M.
AU - Fabula, T.
AU - Schumacher, A.
AU - Wagner, H. -. J.
PY - 1993
DA - 1993//
TI - Monolithic microbridges in silicon using laser machining and anisotropic etching
JO - Sensors and Actuators A
VL - 37–38
ID - Alavi1993
ER -
TY - JOUR
AU - Buser, R. A.
AU - Schultheis, L.
AU - Rooij, N. F.
PY - 1991
DA - 1991//
TI - Silicon pressure sensor based on a resonating element
JO - Sensors and Actuators A
VL - 25–27
ID - Buser1991
ER -
TY - JOUR
AU - Fabula, T.
AU - Wagner, H. -. J.
AU - Schmidt, B.
AU - Büttgenbach, S.
PY - 1994
DA - 1994//
TI - Triple-beam resonant silicon force sensor based on piezoelectric thin films
JO - Sensors and Actuators A
VL - 41–42
ID - Fabula1994
ER -
TY - JOUR
AU - Greenwood, J. C.
AU - Satchell, D. W.
PY - 1988
DA - 1988//
TI - Miniature silicon resonant pressure sensor
JO - IEE Proc.
VL - 135
ID - Greenwood1988
ER -
TY - JOUR
AU - Ikeda, K.
AU - Kuwayama, H.
AU - Kobayashi, T.
AU - Watanabe, T.
AU - Nishikawa, T.
AU - Yoshida, T.
AU - Harada, K.
PY - 1990
DA - 1990//
TI - Silicon pressure sensor integrates resonant strain gauge on diaphragm
JO - Sensors and Actuators
VL - A21–A23
ID - Ikeda1990
ER -
TY - BOOK
AU - Prak, A.
AU - Fabula, T.
AU - Wagner, H. -. J.
AU - Elwenspoek, M.
PY - 1994
DA - 1994//
TI - Resonant microsensors
PB - ed. FSRM
CY - Neuchâtel, Switzerland
ID - Prak1994
ER -
TY - STD
TI - Schumacher, A.; Alavi, M.; Fabula, T.; Schmidt, B.; Wagner, H.-J.: (1994) Monolithic bridge-on-diaphragm microstructure for sensor applications. Proc. Micro System Technologies '94, Berlin, Germany, Oct. 19–21, pp. 309–316
ID - ref8
ER -
TY - JOUR
AU - Tilmans, H. A. C.
AU - Elwenspoek, M.
AU - Fluitman, J. H. J.
PY - 1992
DA - 1992//
TI - Micro resonant force gauges
JO - Sensors and Actuators A
VL - 30
ID - Tilmans1992
ER -
TY - JOUR
AU - Thornton, K. E. B.
AU - Uttamchandani, D.
AU - Culshaw, B.
PY - 1990
DA - 1990//
TI - A sensitive optically excited resonator pressure sensor
JO - Sensors and Actuators A
VL - 24
ID - Thornton1990
ER -